| - Wetted Material: Standard flowbody- 316 stainless steel; O-ring- Viton or FFKM available
- Output Signal: 0~5 VDC Linear min. load 1000Ω
- Input Power: 24VDC, 15VDC, 12VDC available
- Accuracy:
±1.5% F.S. (for 10 SCCM~5 SLM, including linearity);
±5% F.S. (0~25% flow range);
±2% F.S. (25~100% flow range) - Turn Down Ratio: 50:1
- Repeatability: ±0.15% F.S. or better
- Electric Connection: 5 Pin post header (provide with mating connector)
- Process Connection: ¼”NPT female
- Range: 0~10 SCCM to 0~50 SLM
- Minimum Pressure: 40” H2O
- Max. Pressure: 500 psig
- Temperature Range: 0~50°C
- Response Time: 1 second
- Temp. Coefficient: 0.05% full scale per 1°C or better
- Pressure Coefficient: 0.01% full scale per PSIG or better
- Weight: app. 0.5 kg
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